Nano-dimensional analysis for practical materials using the nano-beam SIMS apparatus
نویسندگان
چکیده
منابع مشابه
Nano Characterization of Materials
Material and device characterization is challenged by continuously decreasing device dimensions placing significant demands on characterization instruments and measurement interpretation. The trend in many techniques is clearly toward characterization of smaller dimensions. Among the myriad of characterization techniques in use today, I discuss recent advances in probe microscopy, interferometr...
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ژورنال
عنوان ژورنال: e-Journal of Surface Science and Nanotechnology
سال: 2004
ISSN: 1348-0391
DOI: 10.1380/ejssnt.2004.131